Gary Yama

Nucleic Acid Sequencing Via Enzyme Translocators

SENSOR UNIT OF A NUCLEIC ACID ANALYSIS SYSTEM

SEQUENCING BY SYNTHESIS USING ELECTROACTIVELY LABELED 3-OH-MODIFIED NUCLEOTIDES

NUCLEIC ACID DETECTION WITH A NANOGAP ELECTRICAL SENSOR

ENZYME TRANSLOCATORS IN NANOGAP WITH 3' -ESTERS

DIFFUSION-BASED ELECTROCHEMICAL SENSORS

Faulty pressure sensor determination of a portable communication device touch display

Apparatus for sensing and three dimensional haptic

Electrochemical sequencing of DNA using an edge electrode

Laser carbonization of polymer coatings in an open-air environment

System and method for maintaining a smoothed and anti-stiction surface on a MEMS device

System and method for maintaining a smoothed surface on a MEMS device

Bolometer fluid flow sensor

Bolometer fluid flow and temperature sensor

MEMS structure with graphene component

Modular deformable platform

Resistive switching for MEMS devices

Flexible disposable MEMS pressure sensor

Method to modulate the sensitivity of a bolometer via negative interference

Epi-poly etch stop for out of plane spacer defined electrode

Atomic Layer Deposition Layer for a Microelectromechanical system (MEMS) Device

Trench based capacitive humidity sensor

Titanium nitride for MEMS bolometers

MEMS device having a getter

Epi-poly etch stop for out of plane spacer defined electrode

Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure

Metal Oxide Semiconductor Sensor and Method of Forming a Metal Oxide Semiconductor Sensor Using Atomic Layer Deposition

Thermally shorted bolometer

Portable device with temperature sensing

MEMS infrared sensor including a plasmonic lens

Metamaterial and method for forming a metamaterial using atomic layer deposition

Portable device with temperature sensing

Anisotropic conductor and method of fabrication thereof

Passivation layer for harsh environments and methods of fabrication thereof

Thin-film encapsulated infrared sensor

Out-of-plane spacer defined electrode

Suspension and absorber structure for bolometer

Method of manufacturing a sensor device having a porous thin-film metal electrode

Bolometer having absorber with pillar structure for thermal shorting

Resistive MEMS humidity sensor

Methods to combine radiation-based temperature sensor and inertial sensor and/or camera output in a handheld/mobile device

Wafer with recessed plug

MEMS infrared sensor including a plasmonic lens

Structured gap for a MEMS pressure sensor

Multi-stack film bolometer

Tri-axis accelerometer having a single proof mass and fully differential output signals

Serpentine IR sensor

CMOS bolometer

Substrate with multiple encapsulated devices

Wafer with spacer including horizontal member

Atomic layer deposition strengthening members and method of manufacture

Method of forming non-planar membranes using CMP

Method of forming membranes with modified stress characteristics

Out-of-plane spacer defined electrode

Wafer with recessed plug

Wafer with spacer including horizontal member

MEMS package or sensor package with intra-cap electrical via and method thereof

Device formed using a hard mask and etch stop layer

Method of manufacturing a planar electrode with large surface area

Tri-axis accelerometer having a single proof mass and fully differential output signals

Substrate with multiple encapsulated pressures

Method of epitaxially growing piezoresistors

Method of etching a device using a hard mask and etch stop layer

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Tri-axis accelerometer having a single proof mass and fully differential output signals

Dual-axis yaw rate sensing unit having a tuning fork gyroscope arrangement

In-plane mechanically coupled microelectromechanical tuning fork resonators

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Method for manufacturing a microsystem