Stuttgart
Germany
4
2008-12-04
The entities that hold a legal rights for patent applications filed by inventor Scheible Guenter:
Guenter Scheible from Stuttgart, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
#2 | 2008-11-27PROJECTION OBJECTIVE FOR IMMERSION LITHOGRAPHY
#3 | 2005-12-29Monocrystalline optical component with curved surface and multilayer coating
#4 | 2005-10-13Projection objective for immersion lithography
4299699 ⎘