Dresden
Germany
2
2008-12-04
Michael Lering from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Wafer Cassette, Wafer Cassette Pod and Minienvironment Chamber Loadport Arrangement with a Minienvironment Chamber and a Wafer Cassette Pod with a Wafer Cassette
#2 | 2007-08-16Device for the storage and use of at least one photomask for lithographic projection and method for using the device in an exposure installation
4304515 ⎘