Suwon-si
South Korea
5
2007-08-30
The entities that hold a legal rights for patent applications filed by inventor Lee Eun-Taeck:
Eun-Taeck Lee from Suwon-si, KR has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of forming a layer and method of removing reaction by-products
#2 | 2007-02-22Method of forming plasma and method of forming a layer using the same
#3 | 2007-01-04Chamber inserts and apparatuses for processing a substrate
#4 | 2006-06-29Combination of showerhead and temperature control means for controlling the temperature of the showerhead, and deposition apparatus having the same
#5 | 2006-06-15Method of depositing a metal compound layer and apparatus for depositing a metal compound layer
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