Robert J. Steger

City:

San Jose, California

Country:

United States

Published Applications:

Last publication date:

2007-06-28

Top Assignees for applications by Robert J. Steger

The entities that hold a legal rights for patent applications filed by inventor Steger Robert J.:

Robert J. Steger from San Jose, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Cleaning of electrostatic chucks using ultrasonic agitation and applied electric fields

Electrostatic chuck having radial temperature control capability

Electrostatic chuck having radial temperature control capability

InventorID:

4331456 ⎘