Berkeley, California
United States
3
2007-03-08
The entities that hold a legal rights for patent applications filed by inventor Neureuther Andrew R.:
Andrew R. Neureuther from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Phase shifting test mask patterns for characterizing illumination and mask quality in image forming optical systems
#2 | 2006-08-24Phase-shifting test mask patterns for characterizing illumination polarization balance in image forming optical systems
#3 | 2006-04-18Characterizing aberrations in an imaging lens and applications to visual testing and integrated circuit mask analysis
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