Beverly, Massachusetts
United States
4
2007-03-29
The entities that hold a legal rights for patent applications filed by inventor Mehta Sandeep:
Sandeep Mehta from Beverly, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and apparatus for plasma implantation with improved dopant profile
#2 | 2006-10-05Plasma ion implantation systems and methods using solid source of dopant material
#3 | 2006-09-14Shallow-junction fabrication in semiconductor devices via plasma implantation and deposition
#4 | 2006-05-11Plasma implantation using halogenated dopant species to limit deposition of surface layers
4382006 ⎘