Meiningen
Germany
7
2009-04-14
The entities that hold a legal rights for patent applications filed by inventor Becker Hans:
Hans Becker from Meiningen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Mask blank for use in EUV lithography and method for its production
#2 | 2007-04-05Attenuated phase shift mask blank and photomask
#3 | 2006-06-01Method of producing a mask blank for photolithographic applications, and mask blank
#4 | 2006-01-12Method for manufacturing of a mask blank for EUV photolithography and mask blank
#5 | 2005-11-24Mask blank having a protection layer
#6 | 2005-09-01Ultra high transmission phase shift mask blanks
#7 | 2005-03-10Attenuating phase shift mask blank and photomask
4387431 ⎘