Frank Sobel

City:

Meiningen

Country:

Germany

Published Applications:

Last publication date:

2009-04-14

Top Assignees for applications by Frank Sobel

The entities that hold a legal rights for patent applications filed by inventor Sobel Frank:

Frank Sobel from Meiningen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Mask blank for use in EUV lithography and method for its production

Attenuated phase shift mask blank and photomask

Method of producing a mask blank for photolithographic applications, and mask blank

Method for manufacturing of a mask blank for EUV photolithography and mask blank

Attenuating phase shift mask blank and photomask

InventorID:

4387436 ⎘