Eiji Okuno

City:

Kyoto

Country:

Japan

Published Applications:

Last publication date:

2007-04-12

Top Assignees for applications by Eiji Okuno

The entities that hold a legal rights for patent applications filed by inventor Okuno Eiji:

Eiji Okuno from Kyoto, JP has applied for patents for these inventions. The list has both pending applications and granted patents:

Substrate processing apparatus and substrate transfer method

Substrate transport apparatus and substrate transport method

Substrate holding device and substrate processing apparatus

Substrate holding and rotating apparatus

InventorID:

4391218 ⎘