Martti Sonninen

City:

Espoo

Country:

Finland

Published Applications:

Last publication date:

2007-05-24

Top Assignees for applications by Martti Sonninen

The entities that hold a legal rights for patent applications filed by inventor Sonninen Martti:

Martti Sonninen from Espoo, FI has applied for patents for these inventions. The list has both pending applications and granted patents:

PRECURSOR MATERIAL DELIVERY SYSTEM WITH STAGING VOLUME FOR ATOMIC LAYER DEPOSITION

PRECURSOR MATERIAL DELIVERY SYSTEM WITH THERMAL ENHANCEMENTS FOR ATOMIC LAYER DEPOSITION

Precursor material delivery system for atomic layer deposition

InventorID:

4397462 ⎘