Karsten Bubke

City:

Dresden

Country:

Germany

Published Applications:

Last publication date:

2007-11-15

Top Assignees for applications by Karsten Bubke

The entities that hold a legal rights for patent applications filed by inventor Bubke Karsten:

Karsten Bubke from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Illumination system and a photolithography apparatus employing the system

Method for determining an exposure dose and exposure apparatus

InventorID:

4417891 ⎘