Phoenix, Arizona
United States
5
2007-06-14
The entities that hold a legal rights for patent applications filed by inventor Halpin Michael W.:
Michael W. Halpin from Phoenix, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Wafer support system
#2 | 2007-05-31BARRIER COATING FOR VITREOUS MATERIALS
#3 | 2007-03-06Wafer support system
#4 | 2007-01-23Barrier coating for vitreous materials
#5 | 2005-03-22Compact process chamber for improved process uniformity
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