Fishkill, New York
United States
3
2007-05-31
The entities that hold a legal rights for patent applications filed by inventor Loh Stephen K.:
Stephen K. Loh from Fishkill, US has applied for patents for these inventions. The list has both pending applications and granted patents:
DETECTION OF RESIDUAL LINER MATERIALS AFTER POLISHING IN DAMASCENE PROCESS
#2 | 2006-05-11System and method for determining line widths of free-standing structures resulting from a semiconductor manufacturing process
#3 | 2006-05-11Detection of residual liner materials after polishing in damascene process
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