Hitachi
Japan
8
2014-03-06
The entities that hold a legal rights for patent applications filed by inventor Sakurada Takafumi:
Takafumi Sakurada from Hitachi, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Polishing slurry for metal films and polishing method
#2 | 2012-03-15Polishing slurry and polishing method
#3 | 2011-12-29CMP polishing solution and polishing method
#4 | 2011-01-13Polishing slurry for metal films and polishing method
#5 | 2010-07-15Metal polishing slurry and method of polishing a film to be polished
#6 | 2010-05-13Metal polishing slurry and polishing method
#7 | 2009-07-02Method of producing oxide particles, slurry, polishing slurry, and method of polishing substrate
#8 | 2007-06-28Abrasive-free polishing slurry and CMP process
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