Austin, Texas
United States
5
2007-09-18
The entities that hold a legal rights for patent applications filed by inventor Kalk Franklin D.:
Franklin D. Kalk from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Apparatus and method for optimizing a pellicle for off-axis transmission of light
#2 | 2007-07-12Phase-Shift Mask Providing Balanced Light Intensity Through Different Phase-Shift Apertures And Method For Forming Such Phase-Shift Mask
#3 | 2006-11-30Photomask and method for conveying information associated with a photomask substrate
#4 | 2005-01-11Method and apparatus for coupling a pellicle assembly to a photomask
#5 | 2005-01-11Damage resistant photomask construction
4450073 ⎘