Changfeng Xia

City:

Plano, Texas

Country:

United States

Published Applications:

Last publication date:

2007-10-04

Top Assignees for applications by Changfeng Xia

The entities that hold a legal rights for patent applications filed by inventor Xia Changfeng:

Changfeng Xia from Plano, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Systems and methods for removing/containing wafer edge defects post liner deposition

Method and apparatus for removing polymer residue from semiconductor wafer edge and back side

Plating-rinse-plating process for fabricating copper interconnects

Versatile system for wafer edge remediation

Modified clean chemistry and megasonic nozzle for removing backside CMP slurries

InventorID:

4496949 ⎘