Alan Miller

City:

Moraga, California

Country:

United States

Published Applications:

Last publication date:

2008-09-16

Top Assignees for applications by Alan Miller

The entities that hold a legal rights for patent applications filed by inventor Miller Alan:

Alan Miller from Moraga, US has applied for patents for these inventions. The list has both pending applications and granted patents:

Method for hard mask CD trim

Method for hard mask CD trim

Method for planarization etch with in-situ monitoring by interferometry prior to recess etch

Methods and apparatus for the optimization of etch resistance in a plasma processing system

InventorID:

4510227 ⎘