Aalen
Germany
7
2013-09-26
The entities that hold a legal rights for patent applications filed by inventor Arnold Ralf:
Ralf Arnold from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Beam regulating apparatus for an EUV illumination beam
#2 | 2012-12-27Method of measuring a deviation of an optical surface from a target shape using interferometric measurement results
#3 | 2011-06-16Method of measuring a deviation of an optical surface from a target shape
#4 | 2010-07-15Method of measuring a deviation of an optical surface from a target shape
#5 | 2009-10-20Optical system, method of manufacturing an optical system and method of manufacturing an optical element
#6 | 2008-02-21Method of manufacturing an optical element
#7 | 2005-09-22Diffractive optical element
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