Ellwangen
Germany
5
2018-11-22
The entities that hold a legal rights for patent applications filed by inventor Schubert Erich:
Erich Schubert from Ellwangen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Illumination system for illuminating a mask in a microlithographic exposure apparatus
#2 | 2017-12-07Illumination system for illuminating a mask in a microlithographic exposure apparatus
#3 | 2016-06-30Illumination system for illuminating a mask in a microlithographic exposure apparatus
#4 | 2013-09-26Illumination system for illuminating a mask in a microlithographic exposure apparatus
#5 | 2010-10-21Illumination system for illuminating a mask in a microlithographic exposure apparatus
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