Aalen
Germany
31
2018-11-22
The entities that hold a legal rights for patent applications filed by inventor Kohl Alexander:
Alexander Kohl from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Illumination system for illuminating a mask in a microlithographic exposure apparatus
#2 | 2017-12-07Illumination system for illuminating a mask in a microlithographic exposure apparatus
#3 | 2016-06-30Illumination system for illuminating a mask in a microlithographic exposure apparatus
#4 | 2016-01-07Microlithographic projection exposure apparatus illumination optics
#5 | 2013-09-26Illumination system for illuminating a mask in a microlithographic exposure apparatus
#6 | 2012-04-05Microlithographic projection exposure apparatus illumination optics
#7 | 2012-04-05Microlithographic projection exposure apparatus illumination optics
#8 | 2011-08-18Imaging device in a projection exposure facility
#9 | 2009-06-04Imaging Device in a Projection Exposure Machine
#10 | 2009-02-12Imaging device in a projection exposure facility
#11 | 2009-01-08Adjustment arrangement of an optical element
#12 | 2008-07-24Imaging device in a projection exposure machine
#13 | 2008-05-01Optical measuring system, and a projection objective
#14 | 2007-12-04Imaging device in a projection exposure facility
#15 | 2007-03-20Adjustment arrangement of an optical element
#16 | 2007-01-18Adjustment arrangement of an optical element
#17 | 2006-10-17Objective, particularly a projection objective for use in semiconductor lithography
#18 | 2006-07-27Imaging device in a projection exposure machine
#19 | 2006-07-06Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method
#20 | 2006-07-06Optical beam transformation system and illumination system comprising an optical beam transformation system
#21 | 2006-03-21Apparatus for tilting a carrier for optical elements
#22 | 2006-01-19Objective, in particular a projection objective in microlithography
#23 | 2005-12-29Objective, especially a projection objective for microlithography
#24 | 2005-12-01Projection lens and microlithographic projection exposure apparatus
#25 | 2005-11-17Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method
#26 | 2005-11-10Device for holding a beam splitter element
#27 | 2005-09-13Method for correcting oscillation-induced imaging errors in an objective
#28 | 2005-06-23PROJECTION LENS AND MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
#29 | 2005-04-12Projection lens and microlithographic projection exposure apparatus
#30 | 2005-01-20Method for improving the imaging properties of at least two optical elements and photolithographic fabrication method
#31 | 2005-01-11Catadioptric objective
453369 ⎘