Marc Bienert

City:

Saarbruecken

Country:

Germany

Published Applications:

Last publication date:

2013-09-26

Top Assignees for applications by Marc Bienert

The entities that hold a legal rights for patent applications filed by inventor Bienert Marc:

Marc Bienert from Saarbruecken, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Projection exposure apparatus for EUV microlithography and method for microlithographic exposure

InventorID:

453370 ⎘