Frank Scholze

City:

Berlin

Country:

Germany

Published Applications:

Last publication date:

2007-12-13

Top Assignees for applications by Frank Scholze

The entities that hold a legal rights for patent applications filed by inventor Scholze Frank:

CARL ZEISS SMT AG 1 Oberkochen, Germany

Recent patent applications by Scholze Frank

Frank Scholze from Berlin, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2007-12-13

US20070285643A1

Physics

Method For Manufacturing Reflective Optical Element, Reflective Optical Elements, Euv-Lithography Apparatus And Methods For Operating Optical Elements And Euv-Lithography Apparatus, Methods For Determining The Phase Shift, Methods For Determining The Layer Thickness, And Apparatuses For Carrying Out The Methods

InventorID:

4534041 ⎘