Richardson, Texas
United States
3
2007-12-13
The entities that hold a legal rights for patent applications filed by inventor Baum Christopher C.:
Christopher C. Baum from Richardson, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for locating a sub-surface feature using a scatterometer
#2 | 2005-12-27Method for BARC over-etch time adjust with real-time process feedback
#3 | 2005-11-03Method for BARC over-etch time adjust with real-time process feedback
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