Wayne Tu

City:

Fremont, California

Country:

United States

Published Applications:

Last publication date:

2006-02-23

Top Assignees for applications by Wayne Tu

The entities that hold a legal rights for patent applications filed by inventor Tu Wayne:

Lam Research Corp. 1 Fremont, CA United States
LAM RESEARCH CORPORATION 1 Fremont, CA United States

Recent patent applications by Tu Wayne

Wayne Tu from Fremont, US has applied for patents for these inventions. The list has both pending applications and granted patents:

#1 | 2006-02-23

US20060040415A1

Electricity

Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring

#2 | 2005-12-20

US9998858

Method and apparatus for nitride spacer etch process implementing in situ interferometry endpoint detection and non-interferometry endpoint monitoring

InventorID:

4576991 ⎘