Berkeley, California
United States
6
2007-05-01
The entities that hold a legal rights for patent applications filed by inventor Poolla Kameshwar:
Kameshwar Poolla from Berkeley, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and apparatus for equipment matching and characterization
#2 | 2006-04-27Methods of and apparatuses for controlling process profiles
#3 | 2006-03-21Methods of and apparatus for controlling process profiles
#4 | 2006-03-09Methods and apparatus for low distortion parameter measurements
#5 | 2005-06-14Methods and apparatus for deriving thermal flux data for processing a workpiece
#6 | 2005-02-03Sensor methods and apparatus
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