Mountain View, California
United States
2
2006-07-20
The entities that hold a legal rights for patent applications filed by inventor Hefty Robert:
Robert Hefty from Mountain View, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods for removing black silicon and black silicon carbide from surfaces of silicon and silicon carbide electrodes for plasma processing apparatuses
#2 | 2006-05-04Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
4616501 ⎘