Ehime
Japan
4
2006-06-01
The entities that hold a legal rights for patent applications filed by inventor Murakami Junichi:
Junichi Murakami from Ehime, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Wafer charge compensation device and ion implantation system having the same
#2 | 2006-06-01Beam space-charge compensation device and ion implantation system having the same
#3 | 2006-06-01Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system
#4 | 2006-06-01Irradiation system with ion beam/charged particle beam
4633303 ⎘