Oberkochen
Germany
13
2026-04-02
The entities that hold a legal rights for patent applications filed by inventor von Hodenberg Martin:
Martin von Hodenberg from Oberkochen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
METHOD FOR OPERATING AN OPTICAL SYSTEM, AND OPTICAL SYSTEM
#2 | 2024-08-29OPTICAL SYSTEM, PROJECTION EXPOSURE SYSTEM AND METHOD
#3 | 2018-06-21Projection exposure apparatus with at least one manipulator
#4 | 2018-05-17PROJECTION EXPOSURE METHOD AND PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY
#5 | 2016-07-21Projection exposure method and projection exposure apparatus for microlithography
#6 | 2016-06-09Method of operating a microlithographic projection apparatus
#7 | 2016-02-04Projection exposure apparatus with at least one manipulator
#8 | 2016-01-14Microlithographic apparatus
#9 | 2015-11-05Reflective optical element for EUV lithography and method of manufacturing a reflective optical element
#10 | 2015-06-11System correction from long timescales
#11 | 2014-08-28Illumination and displacement device for a projection exposure apparatus
#12 | 2014-07-03Projection objective of a microlithographic projection exposure apparatus
#13 | 2013-10-03Projection exposure apparatus with at least one manipulator
465014 ⎘