Glendale, California
United States
24
2021-07-08
The entities that hold a legal rights for patent applications filed by inventor Avoyan Armen:
Armen Avoyan from Glendale, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Conditioning chamber component
#2 | 2018-11-08Conditioning chamber component
#3 | 2014-09-18Portable sonic particle removal tool with a chemically controlled working fluid
#4 | 2014-01-30Platen and adapter assemblies for facilitating silicon electrode polishing
#5 | 2013-05-02Method of cleaning aluminum plasma chamber parts
#6 | 2013-01-24Dual phase cleaning chambers and assemblies comprising the same
#7 | 2012-05-03Electrode securing platens and electrode polishing assemblies incorporating the same
#8 | 2012-01-19Backside mounted electrode carriers and assemblies incorporating the same
#9 | 2011-12-22Electrode carrier assemblies
#10 | 2011-06-23Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber
#11 | 2010-06-10Platen and adapter assemblies for facilitating silicon electrode polishing
#12 | 2010-06-10Immersive oxidation and etching process for cleaning silicon electrodes
#13 | 2010-02-25Method for inspecting electrostatic chucks with Kelvin probe analysis
#14 | 2009-12-31Processes for reconditioning multi-component electrodes
#15 | 2009-12-31BACKSIDE MOUNTED ELECTRODE CARRIERS AND ASSEMBLIES INCORPORATING THE SAME
#16 | 2009-12-31Peripherally engaging electrode carriers and assemblies incorporating the same
#17 | 2009-12-17Electrode transporter and fixture sets incorporating the same
#18 | 2008-10-02Methodology for cleaning of surface metal contamination from electrode assemblies
#19 | 2008-10-02Cleaning of bonded silicon electrodes
#20 | 2006-06-01Wet cleaning of electrostatic chucks
#21 | 2005-10-06Method of plasma etch endpoint detection using a V-I probe diagnostics
#22 | 2005-07-19Method for toolmatching and troubleshooting a plasma processing system
#23 | 2005-07-14Method for toolmatching and troubleshooting a plasma processing system
#24 | 2005-03-29Method for toolmatching and troubleshooting a plasma processing system
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