Saitama
Japan
10
2020-04-09
The entities that hold a legal rights for patent applications filed by inventor Yoshida Setsuo:
Setsuo Yoshida from Saitama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Forming apparatus and method of manufacturing article
#2 | 2019-08-15Imprint apparatus, imprint method, and article manufacturing method
#3 | 2016-10-20Imprint apparatus
#4 | 2015-05-07Method for determining pattern of mold for imprint, imprint method, and apparatus
#5 | 2013-03-07Imprint apparatus
#6 | 2013-03-07Imprint apparatus
#7 | 2012-04-12Imprint apparatus and article manufacturing method
#8 | 2008-12-18Optical element holding structure, exposure apparatus, and device manufacturing method
#9 | 2006-08-10Optical unit, exposure unit and optical devices
#10 | 2006-05-23Optical unit, exposure unit and optical devices
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