Burkhard Ludwig

City:

Munchen

Country:

Germany

Published Applications:

Last publication date:

2006-08-24

Top Assignees for applications by Burkhard Ludwig

The entities that hold a legal rights for patent applications filed by inventor Ludwig Burkhard:

Burkhard Ludwig from Munchen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Method for optimizing the geometry of structural elements of a circuit design pattern and method for producing a photomask

Method for eliminating phase conflict centers in alternating phase masks, and method for producing alternating phase masks

Method for determining the ability to project images of integrated semiconductor circuits onto alternating phase masks

Integrated circuit arrangement and method for the manufacture thereof

Lithography mask for imaging of convex structures

InventorID:

4690332 ⎘