Munchen
Germany
4
2006-08-24
The entities that hold a legal rights for patent applications filed by inventor Semmler Armin:
Armin Semmler from Munchen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for optimizing the geometry of structural elements of a circuit design pattern and method for producing a photomask
#2 | 2006-03-14Photomask and method of structuring a photoresist by double exposure with imaging auxiliary structures and different exposure tools
#3 | 2005-06-09Method for producing a mask layout avoiding imaging errors for a mask
#4 | 2005-06-02Method for producing for a mask a mask layout which avoids aberrations
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