Shing-Shen Yu

City:

Hsinchu

Country:

Taiwan

Published Applications:

Last publication date:

2006-10-05

Top Assignees for applications by Shing-Shen Yu

The entities that hold a legal rights for patent applications filed by inventor Yu Shing-Shen:

Shing-Shen Yu from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:

Integrated optical metrology and lithographic process track for dynamic critical dimension control

Immersion lithography system with wafer sealing mechanisms

InventorID:

4711536 ⎘