Aalen
Germany
5
2022-02-24
The entities that hold a legal rights for patent applications filed by inventor Wischmeier Lars:
Lars Wischmeier from Aalen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Measurement illumination optical unit for guiding illumination light into an object field of a projection exposure system for EUV lithography
#2 | 2016-11-24Mirror array
#3 | 2016-11-24Method for illuminating an object field of a projection exposure system
#4 | 2013-10-10EUV lithography system
#5 | 2012-10-04MEASUREMENT OF AN IMAGING OPTICAL SYSTEM BY SUPERPOSITION OF PATTERNS
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