Westhausen
Germany
5
2017-07-06
The entities that hold a legal rights for patent applications filed by inventor Kellner Stephan:
Stephan Kellner from Westhausen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Illumination system for microlithography
#2 | 2016-06-09Illumination system for microlithography
#3 | 2015-01-22Illumination system for microlithography
#4 | 2013-10-10EUV lithography system
#5 | 2012-01-26Illumination system for microlithography
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