Munchen
Germany
3
2006-10-17
The entities that hold a legal rights for patent applications filed by inventor Rotsch Christian:
Christian Rotsch from Munchen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Method for communicating a measuring position of a structural element that is to be formed on a mask
#2 | 2005-10-27Method for the formation of a structure size measured value
#3 | 2005-01-06Mask set having separate masks to form different regions of integrated circuit chips, exposure system including the mask set with an aperture device, and method of using the mask set to expose a semiconductor wafer
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