Austin, Texas
United States
15
2013-12-24
The entities that hold a legal rights for patent applications filed by inventor Sonderman Thomas J.:
Thomas J. Sonderman from Austin, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Process control using analysis of an upstream process
#2 | 2013-01-22Parallel fault detection
#3 | 2011-09-13Dynamic adaptive sampling rate for model prediction
#4 | 2008-07-22Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same
#5 | 2007-11-06Total tool control for semiconductor manufacturing
#6 | 2007-08-07Secondary process controller for supplementing a primary process controller
#7 | 2006-10-03Determining transmission of error effects for improving parametric performance
#8 | 2006-09-05Method and apparatus for initializing tool controllers based on tool event data
#9 | 2005-11-29Method and apparatus for updating control state variables of a process control model based on rework data
#10 | 2005-11-01Method and apparatus for dynamically monitoring controller tuning parameters
#11 | 2005-08-30Method and apparatus for controlling process target values based on manufacturing metrics
#12 | 2005-08-02Process control based on an estimated process result
#13 | 2005-07-12Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters
#14 | 2005-05-31Method and apparatus for distinguishing between sources of process variation
#15 | 2005-01-13Methods of controlling properties and characteristics of a gate insulation layer based upon electrical test data, and system for performing same
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