Dresden
Germany
3
2005-06-16
The entities that hold a legal rights for patent applications filed by inventor Volkel Lars:
Lars Volkel from Dresden, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Photosensitive lacquer for providing a coating on a semiconductor substrate or a mask
#2 | 2005-06-09Fabrication method for a hard mask on a semiconductor structure
#3 | 2005-04-28Method for the production of a semiconductor device
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