Pleasanton, California
United States
3
2005-12-27
The entities that hold a legal rights for patent applications filed by inventor Loewenhardt Peter K.:
Peter K. Loewenhardt from Pleasanton, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Methods and apparatus for inspecting contact openings in a plasma processing system
#2 | 2005-09-27Methods and apparatus for the optimization of photo resist etching in a plasma processing system
#3 | 2005-09-22Methods for the optimization of substrate etching in a plasma processing system
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