Frank SCHAEFER

Gas sensor and method for analyzing the measured variables

Optical gas sensor device and method for determining the concentration of a gas

Micromechanical sensor element and sensor device having this type of sensor element

Semiconductor component configured as a diaphragm sensor

Micromechanical semiconductor sensor

Method for producing a semiconductor component and a semiconductor component produced according to the method

Method for producing optically transparent regions in a silicon substrate

Corrosion Protection for Pressure Sensors

Method for producing a semiconductor component having a movable mass in particular, and semiconductor component produced according to this method

Semiconductor component and a method for producing the same

Method of producing a semiconductor sensor component

Pressure sensor featuring pressure loading of the fastening element

Micromechanical component and method

Method for producing micromechanic sensors and sensors produced by said method

Method for production of a semiconductor component and a semiconductor component produced by said method

Method for manufacturing a micromechanical sensor element

Sensor element with trenched cavity

Method and micromechanical component

Method for producing a semiconductor component and a semiconductor component produced according to the method

Method for manufacturing a membrane sensor

Method for manufacturing a diaphragm sensor

Micromechanical component

Micromechanical sensor

Power supply device for a tire-pressure sensor

Method for producing cavities having optically transparent wall

Micromechanical apparatus, pressure sensor, and method

Micromechanical component and pressure sensor having a component of this type