Tarek Lutz

City:

Munchen

Country:

Germany

Published Applications:

Last publication date:

2007-10-30

Top Assignees for applications by Tarek Lutz

The entities that hold a legal rights for patent applications filed by inventor Lutz Tarek:

Tarek Lutz from Munchen, DE has applied for patents for these inventions. The list has both pending applications and granted patents:

Apparatus and method for determining physical properties of a mask blank

Method for detecting and compensating for positional displacements in photolithographic mask units and apparatus for carrying out the method

Method for compensating for scatter/reflection effects in particle beam lithography

Process for producing a mask

InventorID:

4918923 ⎘