Oceanside, California
United States
11
2013-10-24
The entities that hold a legal rights for patent applications filed by inventor Hogle Richard:
Richard Hogle from Oceanside, US has applied for patents for these inventions. The list has both pending applications and granted patents:
CHEMICAL VAPOR DEPOSITION CHAMBER CLEANING WITH MOLECULAR FLUORINE
#2 | 2013-05-30PREVENTION OF POST-PECVD VACUUM AND ABATEMENT SYSTEM FOULING USING A FLUORINE CONTAINING CLEANING GAS CHAMBER
#3 | 2012-11-22METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC LAYER DEPOSITION
#4 | 2012-11-22METHOD AND APPARATUS FOR USING SOLUTION BASED PRECURSORS FOR ATOMIC LAYER DEPOSITION
#5 | 2009-09-03METHOD AND APPARATUS FOR USING SOLUTION PRECURSORS FOR ATOMIC LAYER DEPOSITION
#6 | 2007-04-12Integrated chamber cleaning system
#7 | 2007-04-05H2 conditioning of chamber following cleaning cycle
#8 | 2006-12-07High efficiency trap for deposition process
#9 | 2006-11-30Method and apparatus for using solution based precursors for atomic layer deposition
#10 | 2006-01-26High rate etching using high pressure F2 plasma with argon dilution
#11 | 2005-11-10Method and apparatus for maintaining by-product volatility in deposition process
492097 ⎘