Ben Lomond, California
United States
10
2021-06-17
The entities that hold a legal rights for patent applications filed by inventor Schoepp Alan:
Alan Schoepp from Ben Lomond, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Compact high density plasma source
#2 | 2015-01-08Deposition apparatus including an isothermal processing zone
#3 | 2013-10-24Method for distributing gas for a bevel etcher
#4 | 2009-01-01Apparatuses and methods for cleaning a substrate
#5 | 2008-11-06System, method and apparatus for in-situ substrate inspection
#6 | 2008-09-11Method and system for distributing gas for a bevel edge etcher
#7 | 2008-03-06Controlled ambient system for interface engineering
#8 | 2008-03-06METHOD FOR GAP FILL IN CONTROLLED AMBIENT SYSTEM
#9 | 2006-06-29System, method and apparatus for in-situ substrate inspection
#10 | 2005-06-23Apparatuses and methods for cleaning a substrate
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