Holzschwang
Germany
4
2015-02-26
The entities that hold a legal rights for patent applications filed by inventor HUBER Peter:
Peter HUBER from Holzschwang, DE has applied for patents for these inventions. The list has both pending applications and granted patents:
Mirror for the EUV wavelength range, method for producing such a mirror, and projection exposure apparatus comprising such a mirror
#2 | 2015-02-12Optical Elements Comprising Magnetostrictive Material
#3 | 2014-07-17Reflective optical element and optical system for EUV lithography
#4 | 2013-01-24Arrangement for and method of characterising the polarization properties of an optical system
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