Mirko Hattass

METHOD FOR OPERATING A LIDAR SENSOR SYSTEM

OPERATING DEVICE AND METHOD FOR OPERATING A ROTATION-RATE SENSOR

OPERATOR DEVICE AND METHOD FOR OPERATING A CAPACITIVE SENSOR

SYSTEM AND METHOD FOR DETERMINING A FREQUENCY AND/OR FREQUENCY CHANGE OF A DRIVE OSCILLATION OF AN INERTIAL SENSOR

METHOD FOR CALIBRATING A SENSOR, PROCESSING UNIT AND SENSOR SYSTEM

METHOD FOR OPERATING A LIDAR UNIT

DEVICE AND METHOD FOR LIGHT-SUPPORTED DISTANCE DETERMINATION, CONTROL UNIT AND WORKING DEVICE

METHOD FOR OPERATING A PHOTODIODE AND DEVICE FOR CARRYING OUT THE METHOD

Lidar system

Scanning system and transmitting and receiving device for a scanning system

LIDAR system including convection cooling

SENSOR UNIT OF A VEHICLE

Stabilized LiDAR system and method for stabilization

Sensor system for attaching a sensor set-up to a vehicle

Micromechanical yaw rate sensor and method for operating same

Micromechanical yaw rate sensor and method for the production thereof

Micromechanical constituent and method for adjusting an adjustable element

Dual-axis ultra-robust rotation rate sensor for automotive applications

MEMS rotation rate sensor including combined driving and detection

Rotational speed sensor with minimized interference movements in the driving mode

Rotation rate sensor and method

Micromechanical device and method for the two-dimensional deflection of light

Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another

MEMS element including a stress decoupling structure and a component including such a MEMS element

INTERPOSER FOR MOUNTING A VERTICALLY INTEGRATED HYBRID COMPONENT ON A COMPONENT CARRIER

COMBINATION ELECTRODE FOR DRIVE, DRIVE DETECTION, CORIOLIS DETECTION, AND QUADRATURE COMPENSATION

Multiaxial rotation rate sensor including a split central rotor

Sensor device and method for operating a sensor device having at least one seismic mass

Micromechanical spring for an inertial sensor

Rotation rate sensor and a method for operating a rotation rate sensor

Rotation-rate sensor having a substrate having a main extension plane for detecting a rotation rate

Component including two semiconductor elements, which are bonded to one another via a structured bonding layer, and method for manufacturing a component of this type

Vertical Hybrid Integrated MEMS ASIC Component Having A Stress Decoupling Structure

Infrared sensor device and method for producing an infrared sensor device

Hybrid integrated component

Method for calibrating yaw rate sensors

Production process for a micromechanical component and micromechanical component

Acceleration sensor and method for producing an acceleration sensor

Micromechanical structure, in particular sensor arrangement, and corresponding operating method

Hybridly integrated component and method for the production thereof

Micromechanical inertial sensor and method for manufacturing same

Hybrid integrated component and method for the manufacture thereof

Energy source and method for supplying an autonomous electrical load system and the use of same

Micromechanical angular acceleration sensor and method for measuring an angular acceleration

Micromechanical rotary acceleration sensor and method for detecting a rotary acceleration

Rotation rate sensor

Sensor system and method for calibrating a sensor system

Micromechanical component having a test structure for determining the layer thickness of a spacer layer and method for manufacturing such a test structure

Method for determining the sensitivity of an acceleration sensor or magnetic field sensor

Micromechanical component, device for beam deflection of monochromatic light, and spectrometer