Espoo
Finland
4
2026-04-30
The entities that hold a legal rights for patent applications filed by inventor BLOMBERG Tom:
Tom BLOMBERG from Espoo, FI has applied for patents for these inventions. The list has both pending applications and granted patents:
SUBSTRATE PROCESSING APPARATUS AND METHOD
#2 | 2025-05-22A SUBSTRATE PROCESSING APPARATUS AND A METHOD
#3 | 2025-03-06Method and apparatus for cleaning a reaction chamber
#4 | 2021-03-25Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods
5035616 ⎘