Los Altos, California
United States
21
2013-10-31
The entities that hold a legal rights for patent applications filed by inventor Lutz Markus:
Markus Lutz from Los Altos, US has applied for patents for these inventions. The list has both pending applications and granted patents:
Integrated getter area for wafer level encapsulated microelectromechanical systems
#2 | 2011-02-10Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same
#3 | 2010-07-29Microelectromechanical systems having stored charge and methods for fabricating and using same
#4 | 2009-03-05Multi-ring resonator system and method
#5 | 2008-11-27Backside release and/or encapsulation of microelectromechanical structures and method of manufacturing same
#6 | 2008-01-10Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same
#7 | 2007-12-20Microelectromechanical oscillator and method of operating same
#8 | 2007-12-20Microelectromechanical oscillator having temperature measurement system, and method of operating same
#9 | 2007-12-06Methods for trapping charge in a microelectromechanical system and microelectromechanical system employing same
#10 | 2007-12-06Microelectromechanical systems having stored charge and methods for fabricating and using same
#11 | 2007-08-09Wafer encapsulated microelectromechanical structure and method of manufacturing same
#12 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#13 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#14 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#15 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#16 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#17 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#18 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#19 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#20 | 2007-07-26Wafer encapsulated microelectromechanical structure and method of manufacturing same
#21 | 2006-11-30Micromechanical component and method for production thereof
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