Hsinchu
Taiwan
5
2026-02-19
The entities that hold a legal rights for patent applications filed by inventor CHEN Hsiang:
Hsiang CHEN from Hsinchu, TW has applied for patents for these inventions. The list has both pending applications and granted patents:
HIGH-EFFICIENCY INNER AIR PURGE DESIGN FOR FRAME CASSETTES FOR SEMICONDUCTOR MANUFACTURING
#2 | 2024-11-21LITHOGRAPHY THERMAL CONTROL
#3 | 2023-09-07Lithography thermal control
#4 | 2023-03-02Lithography thermal control
#5 | 2021-05-20Method of operating semiconductor apparatus and semiconductor apparatus
5084795 ⎘