Toyama
Japan
4
2022-05-05
The entities that hold a legal rights for patent applications filed by inventor TAKAMI Eiko:
Eiko TAKAMI from Toyama, JP has applied for patents for these inventions. The list has both pending applications and granted patents:
Method of Manufacturing Semiconductor Device, Substrate Processing Method, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus
#2 | 2022-01-06Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
#3 | 2021-06-17Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium
#4 | 2020-03-26Method of manufacturing semiconductor device, and recording medium
5111527 ⎘